Plasma-Therm Announces Acquisition of OEM Group PVD, RTP and Etch Business
ST. PETERSBURG, Fla. — Plasma-Therm, a leading manufacturer of plasma-process equipment for the semiconductor industry, announced today the acquisition of OEM Group’s dry process equipment business. With the acquisition, Plasma-Therm has acquired all original OEM licenses and intellectual property rights for SFI Endeavor, AG Heatpulse, MRC Eclipse, and Tegal brand equipment. Plasma-Therm will continue to support existing customers through spare parts and upgrades, while offering new and refurbished tools to the wider market.
“The acquisition allows Plasma-Therm’s award-winning customer service teams to support the large and global install base,” said Abdul Lateef, CEO of Plasma-Therm. “Additionally, PVD and RTP technologies align perfectly with our etch and deposition products and process solutions, which will further support the manufacturing and R&D needs and requirements
of our customers.”
Michael Correra, CEO of OEM Group, said, “We are delighted to have had these outstanding products acquired by PlasmaTherm, ensuring a strong path to market for our newly developed Endeavor M series PVD platform, and the continued availability and support of the MRC Eclipse, AG Heatpulse, and Tegal products. This acquisition allows OEM Group to strategically focus on our wet chemical process and ion implant technologies.”
Established in 1974, Plasma-Therm is a manufacturer of advanced plasma processing equipment for specialty semiconductor
markets, including advanced packaging, wireless communication, photonics, solid-state lighting, MEMS/NEMS,
nanotechnology, renewable energy, data storage, photomask, and R&D. Plasma-Therm offers leading etch and deposition
technologies and solutions for these markets. Sales and service locations throughout North America, Europe, and Asia-Pacific
meet the diverse needs of Plasma-Therm’s global customer base. Visit www.plasmatherm.com for more information.
About OEM Group
Established in 1999, OEM Group is a semiconductor capital equipment manufacturer and innovator in new and
remanufactured 75mm – 300mm tools, spare parts, upgrades, and services. We serve the LED, MEMS, Wireless, Power,
Energy Harvesting, WLP, Data Storage, and Logic markets. OEM Group’s current portfolio of products includes the Semitool &
Cintillio Spray Ozone Tool, Spray Acid Tool, and Spray Solvent Tool, Spin Rinse Dryer and Storm, Varian Implant, and AMAT
P5000 CVD & Etch.