In Q2, the SEMI International Standards Program made progress on several emerging initiatives. Together, we reached a critical milestone for one of our data standards initiatives with Document 6938C recently passing Technical Committee review in mid-June 2025. Ballot 6938C, which provides guidance on how to identify manufacturing equipment data provided by the equipment supplier that can be used in equipment engineering or analysis applications, is slated to join SEMI E190 and E190.1 in providing industry-enabling data standardization.
In addition, we began major revisions to SEMI Standards S2, S8, and S10. These standards govern environmental, health, and safety (EHS) considerations, equipment user fatigue and injury reduction, and equipment risk assessment and evaluation, respectively. In our recently concluded North America Standards Summer 2025 Meetings, the NA EHS Technical Committee Chapter approved a revision ballot to SEMI S10. The ballot (7169) proposed several major revisions to the SEMI S10 Safety Guideline on risk assessment which included changes to references to equipment to objects under consideration. Other changes also included the relocation of the assessment of the risk of harm to property other than the OUC to a Related Information section. Additional details are provided below.
We’re eagerly preparing for this year’s SEMICON West event, taking place for the first time ever in Phoenix, Arizona. We are also pleased to announce the return of the SEMI Global Standards Summit taking place Tuesday afternoon, October 7 at SEMICON West. Our inaugural Summit was held last year at SEMICON Japan 2024 last December. The Summit aims to identify standards-critical areas and work towards an industry standardization strategy for the next 3- and 7-year time horizons. This year’s Global Standards Summit will feature sessions on Supply Chain Traceability as well as Environmental Sustainability. Similarly, as cybersecurity considerations become more complex, SEMICON West will host a dedicated Cybersecurity Forum from October 7-9 to address today’s most pertinent challenges. More detailed program information will be available soon.
Finally, we’re looking forward to our SEMI Standards + Award Ceremony Networking Event at SEMICON West. Following the International Standards Meeting and Standards Summit on Tuesday, October 7, join us for appetizers, drinks, and great conversation from 6-7:30 p.m.
In the meantime, learn more about becoming a member of the SEMI International Standards Program.
Balloting for Document 6938
Document 6938C introduces a new potential standard – Guide for Equipment Edge Data Governance. Under development by the Equipment Edge Data Governance (EEDG) Task Force since 2021, Document 6938C was balloted in Cycle 3-2025 and approved during the Information & Control Taiwan Technical Committee (TC) Chapter meeting held on June 12, 2025. It has since received approval by the International Standards Committee Audits and Reviews Subcommittee and is now undergoing final processing for publication by SEMI.
As manufacturing equipment offers more accessible data than ever, poor communication, inconsistent expectations, and data security concerns continue to halt or slow factory integration efforts. If passed, this new standard will help organize the information that supports smart manufacturing efforts at the edge. In addition, the EEDG Guide will provide a comprehensive set of best practices to both users and suppliers to increase the value of existing equipment data.
Update on Revisions to SEMI S2, S8, and S10 Safety Guidelines
Our 2025 Q1 Standards Watch newsletter announced a significant overhaul for SEMI Standards S2, S8, and S10.
S2, SEMI’s standard for performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment, is undergoing discussions on redefining safety interlock systems. The S2 task force will issue an informal ballot to the general audience for feedback. The results then will be used to develop a formal letter ballot.
First developed in 1995, SEMI Standard S8 works to reduce fatigue and injury by matching equipment to the user’s size, strength, and range of motion. Although this safety standard has been periodically updated since its inception, its last substantial revision was in 2018.
The ballot to revise S8 ultimately failed the EH&S TC Chapter review at this year’s Winter Meeting. With 214 comments and negatives to consider, the task force is revising the ballot and plans to reissue in Cycle 7 of August 2025.
Finally, SEMI Standard S10 is moving through ballot 7169. This standard defines a consistent means of risk estimation that other SEMI Safety Guidelines can invoke. Ballot 7169 will separate facility and building risk assessment to a non-normative portion of the document, ensure EHS risks are separately calculated from commercial object risks, and clarify risk assessment of observed events from risk assessment of foreseen events.
Ballot 7169 results were reviewed on June 5 during the North America Standards Summer meetings. The document was approved and is being processed for publication by SEMI.
Cybersecurity Forum at SEMICON West 2025
This year’s SEMICON West will feature a dedicated Cybersecurity Forum to address the semiconductor industry’s rapidly-changing cybersecurity landscape.
The SEMI Cybersecurity Forum will gather industry experts to share knowledge and experience on the following topics. The goal is to develop actionable strategies and a deeper understanding of current and future cybersecurity risks.
- Cybersecurity in Legacy Semiconductor Tools
- Emerging and Existing Cybersecurity Legislation and Compliance
- Cybersecurity in Maintenance and Manufacturing
- Impact of Cybersecurity Events on Semiconductor Manufacturing Operations
- Supply Chain Security
- Threat Landscape in Semiconductor Manufacturing
The 2025 call for abstracts is now closed. Speakers will be announced in Q3.
SEMI E187 Compliance Guidance White Paper
The SEMI Semiconductor Manufacturing Cybersecurity Consortium (SMCC), in collaboration with industry experts, is pleased to announce the release of the SEMI E187 Compliance Guidance Whitepaper. This comprehensive resource is designed to support semiconductor equipment suppliers and device manufacturers as they work to meet the requirements of the SEMI E187 0122 Standard – The Specification of Cybersecurity of Fab Equipment.
Professionals involved in tool development, manufacturing, operations, and security will find the guidance particularly relevant and actionable. It provides guidance to address all twelve SEMI E187 requirements and focuses on new to fab equipment.
Download the Whitepaper for free
SEMI Standards North America Summer Meetings
This year’s SEMI Standards North America Summer Meetings were held from June 2-5 at SEMI’s headquarters in Milpitas, California. The meetings convened 11 committees and 40 task forces to discuss topics ranging from EHS to facilities, 3D packaging, MEMS, and more. In addition to the results of ballot 7169, technical changes to ballot 6601B, New Standard: Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water, was also approved by the Liquid Chemicals North America TC Chapter, since the activity began in 2019. A Ratification Ballot will be issued in Cycle 7-2025 to verify the changes. In total, over 15 activities, ranging from Auxiliary Information, Reapprovals, and Line-Item ballots, also recently passed Procedural Review by the International Standards Committee (ISC) Audits & Reviews Subcommittee and will be forwarded to Publications for final processing.
The next SEMI International Standards Meeting will be held at SEMICON West from October 7-9 at the Phoenix Convention Center. Some technical committees and task forces may meet virtually outside of this meeting set, so be sure to check the SEMI Standards calendar of events for updates.
Standards Introduced in Q2 2025
New and revised standards released in Q2.
April 2025 standards: https://store-us.semi.org/collections/standards/stdpbc-0425
May 2025 standards: https://store-us.semi.org/collections/standards/stdpbc-0525
June 2025 standards: https://store-us.semi.org/collections/standards/stdpbc-0625
Get Involved
SEMI Standards development activities take place throughout the year in all major manufacturing regions. To participate, join the SEMI International Standards Program.
SEMI Standards are available through individual download purchases or online via SEMIViews. Sign up for a 30-day SEMIViews trial.
For more information, please visit the Standards website and events page. For any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Paul Trio is Director of Standards at SEMI.
