New metrology platform from Newport

Newport Corporation has announced its new ISM300 Integrated Metrology Platform, described as a compact, integrated XY-Theta positioning platform specifically designed for fast and accurate measurements in applications such as 300 mm wafer metrology, thin film measurements, and other semiconductor applications. Featuring a unique 3-plate design and direct-drive rotation, this compact, low-profile system is said to achieve total surface access on 300 mm wafers while maintaining a constant orientation of the patterned elements on the wafer relative to the measurement optics.The ISM300 maintains CE and ISO Class 2 clean room compliance. All components and cabling have been selected for long life and minimum wear. Standard linear axis resolution for the ISM300 system is 0.1 mm; however this and other performance parameters of the platform may also be custom configured to the user’s needs. Newport believes that the ISM300 meets the demanding requirements of today’s integrated metrology.Source: PCBnewsline