BTU International introduces in-line diffusion system
Sep 07, 2007
BTU International, Inc. has introduced its new In-Line Diffusion System for photovoltaic processing. The new system is featured in the BTU booth, G-26, Hall 16, at the 22nd European Photovoltaic Solar Energy Conference and Exhibition, September 3 - 7, Fiero Milano, Milan, Italy.
BTU's integrated In-line Diffusion System combines it's proven TFQ Series Quartz-Lined (conveyor belt) Diffusion Furnace with new phosphorous doping technology featuring an ultrasonic direct spray phosphorous doper that processes up to 1,500 wafers per hour.
Thanks to this new technology, the BTU In-Line Diffusion System can be configured to achieve consistently high-volume production. The use of in-line processing offers reduced wafer handling and greater throughput than traditional batch processing. Reduced handling translates into lower breakage rates and improved yield. Typical processing times are only 20-25 minutes. Integrated doper and furnace controls simplify and streamline operation with a single interface.
"Use of an in-line diffusion system will be a major improvement in throughput and productivity for solar cell manufacturers," said Bob Bouchard, BTU product marketing manager for alternative energy. "BTU's system, utilizing the quartz-lined TFQ Furnace, has unparalleled thermal uniformity and gives our customers extremely predictable and repeatable sheet resistance values. We are excited that this combination of higher throughput and excellent yield supports the industry goal of maximizing cell efficiencies while reducing cell costs."