VPLs for semiconductor capital equipment OEMs

New Way Precision has announced its Vacuum Preloaded (VPL) Air Bearings, said to provide Semiconductor capital equipment manufacturers with the potential to combine X and Y linear motion and theta rotation all on one flat surface, and eliminating the need to stack several separate stages. VPLs allow stages to be built that are kinematically correct and not over-constrained. By minimizing the stack height, angular and thermal errors are also minimized. New Way air bearings can also fly over patterned wafers to provide containment of process gases, fluids, or vacuum. When used with differentially pumped grooves, air bearings can be used to create vacuum feed-throughs that keep motion control systems outside the vacuum chamber.The new VPL air bearings and flexure mounts are available as standard, modular units directly from stock. Custom VPLs are also available. Large custom VPLs can be manufactured integral to other structural components (like a Z stage) or they can be bonded in place. Custom VPLs can be made in ceramic, metal, or composite materials.Source: PCBnewsline