JPSA launches UV excimer beam delivery system
Sep 23, 2005
J P Sercel Associates (JPSA) has introduced its new Microtech MBD2 Beam Delivery System for UV excimer lasers. While the original Microtech system has been popular with Universities and research institutions, the new MBD2 is an industrial-grade, large-format system designed for 24/7 production in an industrial environment. It accommodates JPSA's new large-format beam delivery system modules such as the new turning mirror and beam splitter, both of which feature a 50mm x 50mm clear aperture that allows passage of a larger-diameter homogenized beam without beam corner clipping. It is an especially useful system for users who have optical tables, lasers, and motion controls, and need a comprehensive (homogenized) mask imaging system. The new MBD2 can operate at short UV wavelengths, and is designed to be compatible with all of JPSA's larger mirrors, optics, beam homogenizers, spacers, mounts, and other beam delivery system components such as variable attenuators and dual camera systems. All optics and modules can be integrated using JPSA's universal dovetail mounting system. For more information, visit www.jpsalaser.com
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