ECI Introduces QualiSurf(TM) wet processing solution analyzer for sub-90 nm technologies

ECI Technology announced the QualiSurf wet processing solution analyzer. The QualiSurf monitors, in real time, concentrations of single and multi-component chemistries. QualiSurf supports automated wet stations (AWS) as well as single-wafer tools. The analyzer is perfect for dilute chemistries that are indispensable for cleaning processes of sub-90nm technologies.

A unique non-invasive optical detection system and proprietary algorithms enable users to maintain concentrations and component ratios to the highest precision. No chemicals are in direct contact with any monitoring hardware, ensuring high reliability of the analyzer. Each QualiSurf comes with multiple channels, monitoring up to 8 chemistries. The applications include SC1, SC2, BHF, DHF, SPM and BEOL organic/semi-aqueous/aqueous chemistries as well as many other novel chemical mixtures.

"Existing leading-edge customers appreciate ECI's expertise in chemical analysis and have requested us to develop in-situ analyzers for wet processing solutions, especially highly dilute chemistries," said ECI's President Marianna Rabinovitch. "From the tremendous response in the recent Semicon West show where we exhibited QualiSurf's capability data and a prototype model, we know that we are on the right track."